En Japonais
- Other title
- Quantitative analysis of tungsten silicide film and borophosphosilicate glass film deposited on a silicon wafer using electron probe microanalysis (en)
- Author
- MAKIISHI, N; YAMAMOTO, A; OKANO, T; MATSUMURA, Y
Kawasaki Steel Corp., tech. res. div., analysis material sci. res. cent., Chiba-shi Chiba 260, Japan - Source
Bunseki Kagaku. 1991, Vol 40, Num 11, pp T195-T202 ; ref : 17 ref
- CODEN
- BNSKAK
- ISSN
- 0525-1931
- Scientific domain
- Analytical chemistry
- Publisher
- Nippon Bunseki Kagakkai, Tokyo
- Publication country
- Japan
- Document type
- Article
- Language
- Japanese
- Keyword (fr)
- Analyse chimique Couche mince Microanalyse Microsonde Sonde électronique Spectrométrie RX Tungstène Siliciure Verre Borophosphosilicate
- Keyword (en)
- Chemical analysis Thin film Microanalysis Microprobe Electron probe X ray spectrometry Tungsten Silicides Glass
- Keyword (es)
- Análisis químico Capa fina Microanálisis Microsonda Sonda electrónica Espectrometría RX Wolframio Siliciuro Vidrio
- Classification
- Pascal
- 001 Exact sciences and technology / 001C Chemistry / 001C04 Analytical chemistry / 001C04C Spectrometric and optical methods
- Discipline
- Analytical chemistry
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 5164047
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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