Optical end point detection of etched YBCO films
- Author
- DOLATA, R; FISCHER, M; JUTZI, W
Univ. Karlsruhe, Inst. Electrotech. Grundlagen Informatik, Karlsruhe 7500, Germany - Source
Physica. C. Superconductivity. 1992, Vol 191, Num 3-4, pp 525-529 ; ref : 10 ref
- ISSN
- 0921-4534
- Scientific domain
- Crystallography; Electronics; Electrical engineering; Condensed state physics
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Keyword (fr)
- Baryum Cuivre Yttrium Oxyde Mixte Composé minéral Couche mince Epaisseur Etude expérimentale Faisceau laser Irradiation Métal transition Composé Propriété optique Réflexion optique Simulation ordinateur Support Traitement surface
- Keyword (en)
- Barium Copper Yttrium Oxides Mixed Inorganic compound Thin film Thickness Experimental study Laser beam Irradiation Transition metal Compounds Optical properties Optical reflection Computer simulation Support Surface treatment
- Keyword (es)
- Bario Cobre Ytrio Óxido Mixto Compuesto inorgánico Capa fina Espesor Estudio experimental Haz láser Irradiación Metal transición Compuesto Propiedad óptica Reflexión óptica Simulación computadora Soporte Tratamiento superficie
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35J Surface and interface dynamics and vibrations
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 5167404
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0921-4534(92)90951-8 
https://dx.doi.org/10.1016/0921-4534(92)90951-8
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