Ammonia decomposition on silicon surfaces studied using transmissio, Fourier transform infrared spectroscopy
- Author
- DILLON, A. C; GUPTA, P; ROBINSON, M. B; BRACKER, A. S; GEORGE, S. M
Stanford univ., dep. chemistry, Stanford CA 94305, United States - Source
Journal of vacuum science and technology. A. Vacuum, surfaces, and films. 1991, Vol 9, Num 4, pp 2222-2230 ; ref : 53 ref
- CODEN
- JVTAD6
- ISSN
- 0734-2101
- Scientific domain
- Metallurgy, welding; Physics
- Publisher
- American Institute of Physics, Melville, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Adsorbant minéral Adsorbat minéral Adsorption gaz solide Ammoniac Composé marqué Décomposition chimique Etude expérimentale In situ Interface gaz solide Méthode physique Réaction surface Semiconducteur Silicium Spectrométrie IR Transformation Fourier Deutérium Hydrogène Isotope
- Keyword (en)
- Inorganic adsorbent Inorganic adsorbate Gas solid adsorption Ammonia Labelled compound Chemical decomposition Experimental study In situ Gas solid interface Physical method Surface reaction Semiconductor materials Silicon Infrared spectrometry Fourier transformation Hydrogen Isotopes
- Keyword (es)
- Adsorbente inorgánico Adsorbato inorgánico Adsorción gas sólido Amoníaco Compuesto marcado Descomposición química Estudio experimental In situ Interfase gas sólido Método físico Reacción superficie Semiconductor(material) Silicio Espectrometría IR Transformación Fourier Hidrógeno Isótopo
- Classification
- Pascal
- 001 Exact sciences and technology / 001C Chemistry / 001C01 General and physical chemistry / 001C01I Surface physical chemistry / 001C01I04 Solid-gas interface
- Discipline
- General chemistry and physical chemistry
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 5172858
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1116/1.577299 
https://dx.doi.org/10.1116/1.577299
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