Hydrogen fluoride vapor etching for Pre-Epi silicon surface preparation
- Author
- MCINTOSH, R; TUNG-SHENG KUAN; DEFRESART, E
IBM, T.J. Watson res. cent., Yorktown Heights NY 10598, United States - Conference title
- 1991 electronic materials conference : selected papers, Boulder, Colorado
- Conference name
- 1991 Electronic materials conference (Boulder CO 1991)
- Author (monograph)
- PANG, STELLA W (Editor)
Univ. Michigan, Ann Arbor MI, United States - Source
Journal of electronic materials. 1992, Vol 21, Num 1, pp 57-60 ; ref : 5 ref
- CODEN
- JECMA5
- ISSN
- 0361-5235
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35G Mechanical and acoustical properties; adhesion
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H45 Solid-fluid interfaces
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 5205764
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1007/BF02670920 
https://dx.doi.org/10.1007/BF02670920
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