Polarization raman microprobe analysis of laser melting and etching in silicon
- Author
- HUA TANG; HERMAN, I. P
Columbia univ., dep. applied physics, microelectronics sci. laboratories, New York NY 10027, United States - Source
Journal of applied physics. 1992, Vol 71, Num 7, pp 3492-3505 ; ref : 45 ref
- CODEN
- JAPIAU
- ISSN
- 0021-8979
- Scientific domain
- Crystallography; Electronics; Optics; Condensed state physics; Physics
- Publisher
- American Institute of Physics, Woodbury, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Atmosphère contrôlée Couche mince Décroissance cristalline Etude expérimentale Faisceau laser Fusion Germanium Pastille électronique Semiconducteur Silicium Spectre Raman
- Keyword (en)
- Controlled atmosphere Thin film Inverse crystal growth Experimental study Laser beam Melting Germanium Wafer Semiconductor materials Silicon Raman spectrum
- Keyword (es)
- Atmósfera controlada Capa fina Decrecimiento cristalino Estudio experimental Haz láser Fusión Germanio Pastilla electrónica Semiconductor(material) Silicio Espectro Raman
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35G Mechanical and acoustical properties; adhesion
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H45 Solid-fluid interfaces
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 5282381
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1063/1.350903 
https://dx.doi.org/10.1063/1.350903
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