Poly(4-methylstyren-co-chloromethylstyrene) : a negative electron beam resist : synthesis and lithography evaluation
- Author
- AFFROSSMAN, S1 ; MASSOUD BAKSHAEE; PETHRICK, R. A; BRAMLEY, D; FONG CHOW; DIX, C; HENDY, P; JONES, M; LEDWITH, A; MILLS, M; MILLER TATE, P
[1] Univ. Strathclyde, dep. pure applied chemistry, Glasgow G1 1XL, United Kingdom - Source
Polymer international. 1992, Vol 28, Num 3, pp 209-217 ; ref : 24 ref
- ISSN
- 0959-8103
- Scientific domain
- Polymers, paint and wood industries
- Publisher
- Wiley, Chichester
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Copolymérisation masse Copolymérisation radicalaire Effet solvant Electrorésist Etude expérimentale Limite résolution Lithographie faisceau électron Préparation Rapport réactivité Relation composition propriété Relation masse moléculaire propriété Resist négatif Sensibilité Styrène(chlorométhyl) copolymère Styrène(méthyl) copolymère Résistance gravure plasma
- Keyword (en)
- Mass copolymerization Radical copolymerization Solvent effect Electroresist Experimental study Resolving power Electron beam lithography Preparation Reactivity ratio Property composition relationship Molecular weight property relation Negative resist Sensitivity Styrene(chloromethyl) copolymer Styrene(methyl) copolymer
- Keyword (es)
- Copolimerización masa Copolimerización radical Efecto solvente Polímero electrosensible Estudio experimental Poder resolución Litografía haz electrón Preparación Relación reactividad Relación composición propiedad Relación masa molecular propiedad Resistencia negativa Sensibilidad Estireno(clorometil) copolímero Estireno(metil) copolímero
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D09 Physicochemistry of polymers / 001D09D Organic polymers / 001D09D02 Preparation, kinetics, thermodynamics, mechanism and catalysts / 001D09D02E Polymers with particular properties
- Discipline
- Physical chemistry of polymers
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 5283953
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1002/pi.4990280306 
https://dx.doi.org/10.1002/pi.4990280306
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