Plasma chemistry in silane/germane and disilane/germane mixtures
- Author
- DOYLE, J. R; DOUGHTY, D. A; GALLAGHER, A
National inst. standards technology, joint inst., lab. astrophysics, Boulder CO 80309-0440, United States - Source
Journal of applied physics. 1992, Vol 71, Num 10, pp 4727-4738 ; ref : 36 ref
- CODEN
- JAPIAU
- ISSN
- 0021-8979
- Scientific domain
- Crystallography; Electronics; Optics; Condensed state physics; Physics
- Publisher
- American Institute of Physics, Woodbury, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Chimie plasma Cinétique Décharge luminescente Décharge électrique Etude expérimentale Germane Mélange binaire Mélange gaz Radiofréquence Silane
- Keyword (en)
- Plasma chemistry Kinetics Glow discharge Electric discharge Experimental study Germane Binary mixture Gas mixture Radiofrequency Silane
- Keyword (es)
- Química plasma Cinética Descarga luminiscente Descarga eléctrica Estudio experimental Germano Mezcla binaria Mezcla gas Radiofrequencia Silano
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B80 Electric discharges
- Discipline
- Physics of gases, plasmas and electric discharges
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 5334083
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1063/1.350663 
https://dx.doi.org/10.1063/1.350663
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