Phase formation in the interfacial reactions of ultrahigh vacuum deposited titanium thin films on (111)Si
- Author
- WANG, M. H; CHEN, L. J
National Tsing Hua univ., dep. materials sci. eng., Hsinchu, Taiwan, Province of China - Source
Journal of applied physics. 1992, Vol 71, Num 12, pp 5918-5925 ; ref : 41 ref
- CODEN
- JAPIAU
- ISSN
- 0021-8979
- Scientific domain
- Crystallography; Electronics; Optics; Condensed state physics; Physics
- Publisher
- American Institute of Physics, Woodbury, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Composé minéral Couche mince Croissance cristalline Diffraction électron réflexion Dépôt sous vide Etude expérimentale Interface solide solide Microscopie électronique transmission Métal transition Réaction chimique Support Titane Siliciure Titane Ultravide Support Si
- Keyword (en)
- Inorganic compound Thin film Crystal growth Reflection high energy electron diffraction Vacuum deposition Experimental study Solid solid interface Transmission electron microscopy Transition metal Chemical reaction Support Titanium Silicides Titanium Ultrahigh vacuum
- Keyword (es)
- Compuesto inorgánico Capa fina Crecimiento cristalino Difracción electrón reflexión Depósito bajo vacío Estudio experimental Interfase sólido sólido Microscopía electrónica transmisión Metal transición Reacción química Soporte Titanio Siliciuro Titanio Ultravacío
- Keyword (de)
- Duennschicht Kristallwachstum RHEED'sche Beugung Vakuumbeschichtungsverfahren Experimentelle Untersuchung Grenzschicht fest fest Transmissionselektronenmikroskopie Uebergangsmetalle Chemische Reaktion Substrat Titan Ultravakuum
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35J Surface and interface dynamics and vibrations
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology
- Discipline
- Metals. Metallurgy Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 5368474
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1063/1.350441 
https://dx.doi.org/10.1063/1.350441
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