An in-process X-ray measuring system with a heat-resistant filter transmitting soft X-rays for light elements
- Author
- NAKAHARA, T; KOSHINAKA, M; BADONO, S; TOMODA, T
Mitsubishi Electric Corp., manufacturing development lab., Amagasaki, Hyogo 661, Japan - Source
Japanese journal of applied physics. 1991, Vol 30, Num 3A, pp L411-L414 ; 2 ; ref : 13 ref
- CODEN
- JJAPA5
- ISSN
- 0021-4922
- Scientific domain
- Crystallography; Optics; Condensed state physics; Physics; Plasma physics
- Publisher
- Japanese journal of applied physics, Tokyo
- Publication country
- Japan
- Document type
- Article
- Language
- English
- Keyword (fr)
- Couche mince Etude expérimentale Rayon X Diffraction réflexion électron haute énergie Spectre Surface
- Keyword (en)
- Thin film Experimental study X ray
- Keyword (es)
- Capa fina Estudio experimental Rayos X
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 5421919
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1143/JJAP.30.L411 
https://dx.doi.org/10.1143/JJAP.30.L411
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