Plasma etching of Ti in fluorine-containing feeds
- Author
- D'AGOSTINO, R; FRACASSI, F; PACIFICO, C; CAPEZZUTO, P
Univ. Barim, cent. studio chimica plasmi, dip. chimica, Bari 70126, Italy - Source
Journal of applied physics. 1992, Vol 71, Num 1, pp 462-471 ; ref : 21 ref
- CODEN
- JAPIAU
- ISSN
- 0021-8979
- Scientific domain
- Crystallography; Electronics; Optics; Condensed state physics; Physics
- Publisher
- American Institute of Physics, Woodbury, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Appareillage Chimie Composition chimique Couche mince Etude expérimentale Gravure plasma Pression Spectrométrie photoélectron Surface Température Titane Traitement surface Microbalance quartz Métal transition
- Keyword (en)
- Instrumentation Chemistry Chemical composition Thin film Experimental study Plasma etching Pressure Photoelectron spectrometry Surface Temperature Titanium Surface treatment Transition metal
- Keyword (es)
- Instrumentación Química Composición química Capa fina Estudio experimental Grabado plasma Presión Espectrometría fotoelectrón Superficie Temperatura Titanio Tratamiento superficie Metal transición
- Keyword (de)
- Chemie Chemische Zusammensetzung Duennschicht Experimentelle Untersuchung Druck ESCA Spektrometrie Oberflaeche Temperatur Titan Oberflaechenbehandlung Uebergangsmetalle
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35B Surface structure and topography
- Discipline
- Metals. Metallurgy Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 5463110
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1063/1.350679 
https://dx.doi.org/10.1063/1.350679
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