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Thermal conductivity and interface thermal resistance of Si film on Si substrate determined by photothermal displacement interferometry

Author
KUO, B. S. W1 ; LI, J. C. M; SCHMID, A. W
[1] Univ. Rochester, dep. mechanical eng., Rochester NY 14627, United States
Source

Applied physics. A, Solids and surfaces. 1992, Vol 55, Num 3, pp 289-296 ; ref : 32 ref

CODEN
APSFDB
ISSN
0721-7250
Scientific domain
Electronics; Condensed state physics
Publisher
Springer, Berlin / Springer, Heidelberg / Springer, New York, NY
Publication country
Germany
Document type
Article
Language
English
Keyword (fr)
Conductivité thermique Couche mince Etude expérimentale Méthode mesure Résistance thermique contact Silicium Spectrométrie optothermique
Keyword (en)
Thermal conductivity Thin film Experimental study Measurement method Contact thermal resistance Silicon Optothermal spectrometry
Keyword (es)
Conductividad térmica Capa fina Estudio experimental Método medida Resistencia térmica contacto Silicio Espectrometría optotérmica
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G20 Thermal instruments, apparatus and techniques

Discipline
Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
5522759

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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