A simple means for reproducibly dosing low vapor pressure and/or reactive gases to surfaces in ultrahigh vacuum
- Author
- HENN, F. C; BUSSELL, M. E; CAMPBELL, C. T
Univ. Washington, dep. chemistry, Seattle WA 98195, United States - Source
Journal of vacuum science and technology. A. Vacuum, surfaces, and films. 1991, Vol 9, Num 1, pp 10-13 ; ref : 6 ref
- CODEN
- JVTAD6
- ISSN
- 0734-2101
- Scientific domain
- Metallurgy, welding; Physics
- Publisher
- American Institute of Physics, Melville, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Etat gazeux Pression Surface Calibration Chambre vide Dosage
- Keyword (en)
- Gaseous state Pressure Surface
- Keyword (es)
- Estado gaseoso Presión Superficie
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G77 Atomic, molecular and charged-particle sources and detectors
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 5554347
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1116/1.577108 
https://dx.doi.org/10.1116/1.577108
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