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Surface morphology of heat-treated ceramic thin films

Author
SUSNITZKY, D. W1 ; CARTER, C. B
[1] Dow Chemical Co., analytical sci. lab., Midland MI 48667, United States
Source

Journal of the American Ceramic Society. 1992, Vol 75, Num 9, pp 2463-2478 ; ref : 76 ref

CODEN
JACTAW
ISSN
0002-7820
Scientific domain
Chemical industry parachemical industry
Publisher
Blackwell, Malden,MA
Publication country
United States
Document type
Article
Language
English
Keyword (fr)
Aluminium Oxyde Composé minéral Couche mince Céramique oxyde Céramique Etude expérimentale Gradin Microscopie électronique transmission Morphologie Reconstruction surface Recuit thermique Silicium Carbure Surface
Keyword (en)
Aluminium Oxides Inorganic compound Thin film Oxide ceramics Ceramic materials Experimental study Step Transmission electron microscopy Morphology Surface reconstruction Thermal annealing Silicon Carbides Surface
Keyword (es)
Aluminio Óxido Compuesto inorgánico Capa fina Cerámica óxido Cerámica Estudio experimental Peldaño Microscopía electrónica transmisión Morfología Reconstrucción superficie Recocido térmico Silicio Carburo Superficie
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35J Surface and interface dynamics and vibrations

Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
5570916

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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