An accel-mode einzel lens with through-lens energy analyzer for electron beam testing
- Author
- SAITO, K; WADA, K; OKUBO, T
NTT LSI Laboratories, Atsugi-Shi, Kanagawa 243-01, Japan - Source
Journal of vacuum science and technology. A. Vacuum, surfaces, and films. 1990, Vol 8, Num 2, pp 769-774 ; ref : 14 ref
- CODEN
- JVTAD6
- ISSN
- 0734-2101
- Scientific domain
- Metallurgy, welding; Physics
- Publisher
- American Institute of Physics, Melville, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Aberration optique Analyseur énergie Faisceau électronique Lentille électrostatique Colonne optique électrostatique
- Keyword (en)
- Optical aberration Energy analyzer Electron beam Electrostatic lens
- Keyword (es)
- Aberración óptica Analizador energía Haz electrónico Lente elctrostática
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B79 Optical elements, devices, and systems / 001B40B79B Lenses, prisms, and mirrors
- Discipline
- Physics : optics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 5586885
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1116/1.576915 
https://dx.doi.org/10.1116/1.576915
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