Adhesion studies of magnetron-sputtered copper films on chemically etched nickel substrates: effects of the concentration and the temperature of the bath
- Other title
- Etudes de l'adhérence de couches de cuivre pulvérisées par magnetron sur des supports de nickel attaqués chimiquement: influences de la concentration et de la température du bain (fr)
- Author
- CAILLER, M1 ; LAHMAR, A; LEE, G. H
[1] ISITEM, Univ. Nantes, lab. sci. surfaces interfaces mécanique, Nantes 44072, France - Source
Thin solid films. 1989, Vol 182, Num 1-2, pp 167-184 ; ref : 15 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Keyword (fr)
- Adhérence Attaque chimique Couche mince Essai adhérence Etude expérimentale Magnétron Microscopie électronique balayage Métal transition Nitrique acide Pulvérisation haute fréquence Rugosité Température Métal pur Cu Métal pur Ni
- Keyword (en)
- Adhesion Chemical etching Thin film Adhesion test Experimental study Magnetron Scanning electron microscopy Transition metal Nitric acid Radiofrequency sputtering Roughness Temperature
- Keyword (es)
- Adherencia Ataque químico Capa fina Ensayo adherencia Estudio experimental Magnetrón Microscopía electrónica barrido Metal transición Nítrico ácido Pulverización alta frecuencia Rugosidad Temperatura
- Keyword (de)
- Adhaesion Chemisches Aetzen Duennschicht Adhaesionsversuch Experimentelle Untersuchung Rasterelektronenmikroskopie Uebergangsmetalle Salpetersaeure Rauhigkeit Temperatur
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35B Surface structure and topography
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A05 Specific materials / 001B80A05B Metals, semimetals and alloys
- Discipline
- Metals. Metallurgy Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 6823268
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0040-6090(89)90253-8 
https://dx.doi.org/10.1016/0040-6090(89)90253-8
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