Adhesion studies of magnetron-sputtered copper films on nickel substrates: effects of substrate surface pretreatments
- Other title
- Etude de l'adhérence de couches de cuivre pulvérisées par magnétron sur des substrats de nickel: influence de prétraitements de la surface du substrat (fr)
- Author
- LEE, G. H1 ; CAILLER, M; KWON, S. C
[1] Ecole nationale supérieure mécanique, lab. sci. matériaux, Nantes 44072, France - Source
Thin solid films. 1990, Vol 185, Num 1, pp 21-33 ; ref : 25 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Keyword (fr)
- Adhérence Attaque chimique Couche mince Etude expérimentale Ion Irradiation Métal transition Traitement surface Métal pur Cu Magnétron Métal pur Ni Pulvérisation haute fréquence
- Keyword (en)
- Adhesion Chemical etching Thin film Experimental study Ions Irradiation Transition metal Surface treatment Magnetron Radiofrequency sputtering
- Keyword (es)
- Adherencia Ataque químico Capa fina Estudio experimental Ión Irradiación Metal transición Tratamiento superficie Magnetrón Pulverización alta frecuencia
- Keyword (de)
- Adhaesion Chemisches Aetzen Duennschicht Experimentelle Untersuchung Ion Bestrahlung Uebergangsmetalle Oberflaechenbehandlung
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60B Mechanical and acoustical properties of condensed matter / 001B60B20 Mechanical properties of solids / 001B60B20Q Tribology and hardness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A05 Specific materials / 001B80A05B Metals, semimetals and alloys
- Discipline
- Metals. Metallurgy Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 6873893
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0040-6090(90)90004-W 
https://dx.doi.org/10.1016/0040-6090(90)90004-W
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