Decomposition of silane on Si(111)-(7×7) and Si(100)-(2×1) surfaces below 500 °C
- Author
- GATES, S. M1 ; GREENLIEF, C. M; BEACH, D. B; HOLBERT, P. A
[1] T. J. Watson res. cent., IBM res. div., Yorktown Heights NY 10598, United States - Source
The Journal of chemical physics. 1990, Vol 92, Num 5, pp 3144-3153 ; ref : 34 ref
- CODEN
- JCPSA6
- ISSN
- 0021-9606
- Scientific domain
- Atomic molecular physics; Condensed state physics; Polymers, paint and wood industries
- Publisher
- American Institute of Physics, Woodbury, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Adsorbant minéral Adsorbat organique Adsorption gaz solide Chimisorption Etude théorique Face cristalline Interface gaz solide Isotherme adsorption Semiconducteur Silane Silicium Spectrométrie SIMS Température
- Keyword (en)
- Inorganic adsorbent Organic adsorbate Gas solid adsorption Chemisorption Theoretical study Crystal face Gas solid interface Adsorption isotherm Semiconductor materials Silane Silicon Secondary ion mass spectrometry Temperature
- Keyword (es)
- Adsorbente inorgánico Adsorbato orgánico Adsorción gas sólido Adsorción química Estudio teórico Cara cristal Interfase gas sólido Isotermo adsorción Semiconductor(material) Silano Silicio Espectrometría SIMS Temperatura
- Classification
- Pascal
- 001 Exact sciences and technology / 001C Chemistry / 001C01 General and physical chemistry / 001C01I Surface physical chemistry / 001C01I04 Solid-gas interface
- Discipline
- General chemistry and physical chemistry
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 6884912
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1063/1.457912 
https://dx.doi.org/10.1063/1.457912
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