Gas density reduction effects in magnetrons
- Author
- ROSSNAGEL, S. M1
[1] IBM T. J. Watson res. cent., Yorktown Heights NY 10598, United States - Source
Journal of vacuum science and technology. A. Vacuum, surfaces, and films. 1988, Vol 6, Num 1, pp 19-24 ; ref : 19 ref
- CODEN
- JVTAD6
- ISSN
- 0734-2101
- Scientific domain
- Metallurgy, welding; Physics
- Publisher
- American Institute of Physics, Melville, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Cathode Courant électrique Décharge électrique Magnétron Densité gaz
- Keyword (en)
- Cathode Electric current Gaz density Electric discharge Magnetron
- Keyword (es)
- Cátodo Corriente eléctrica Descarga eléctrica Magnetrón
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B80 Electric discharges
- Discipline
- Physics of gases, plasmas and electric discharges
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 7026822
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1116/1.574988 
https://dx.doi.org/10.1116/1.574988
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