Pascal and Francis Bibliographic Databases

Help

Export

Selection :

Permanent link
http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=7069556

Thermodynamic investigation of selective tungsten chemical vapour deposition: influence of growth conditions and gas additives on the selectivity in the fluoride process

Other title
Etude thermodynamique du dépôt sélectif chimique en phase vapeur du tungstène: influence des conditions de croissance et des additifs gazeux sur la sélectivité sur le processus des fluorures (fr)
Author
CARLSSON, J.-O1 ; HARSTA, A
[1] Univ. Uppsala, dep. chemistry, Uppsala 751 21, Sweden
Source

Thin solid films. 1988, Vol 158, Num 1, pp 107-122 ; ref : 13 ref

CODEN
THSFAP
ISSN
0040-6090
Scientific domain
Crystallography; Electronics; Metallurgy, welding; Condensed state physics
Publisher
Elsevier Science, Lausanne
Publication country
Switzerland
Document type
Article
Language
English
Keyword (fr)
Couche mince Dépôt phase vapeur Etude expérimentale Fluorure Milieu gazeux Potentiel chimique Réaction chimique Silicium Support Sélectivité Thermodynamique Métal pur W
Keyword (en)
Thin film Vapour deposition Vapor deposition Experimental study Fluorides Gaseous medium Chemical potential Chemical reaction Silicon Substrate Support Selectivity Thermodynamics
Keyword (es)
Capa fina Depósito fase vapor Estudio experimental Fluoruro Medio gaseoso Potencial químico Reacción química Silicio Soporte Selectividad Termodinámica
Keyword (de)
Duennschicht Aufdampfen Experimentelle Untersuchung Fluorid Chemisches Potential Chemische Reaktion Silicium Substrat Thermodynamik
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A05 Specific materials / 001B80A05B Metals, semimetals and alloys

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A10 Methods of crystal growth; physics of crystal growth / 001B80A10B Growth from vapor

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D11 Metals. Metallurgy / 001D11H Analysing. Testing. Standards / 001D11H02 Nondestructive testing / 001D11H02B Measurement of properties and materials state

Discipline
Metals. Metallurgy Physics and materials science
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
7069556

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

Access to the document

Searching the Web