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Thermoluminescence and ESCA investigations in polymer resist layers

Author
KUNZE, R1 ; WÄSCHE, M; LINKE, E
[1] Akad. wiss. DDR, zentralinst. physikalische chemie, Berlin 1199, German Democratic Republic
Source

Progress in colloid & polymer science. 1988, Vol 78, pp 113-115 ; ref : 7 ref

CODEN
PCPSD7
ISSN
0340-255X
Scientific domain
General chemistry, physical chemistry; Polymers, paint and wood industries
Publisher
Springer, New York, NY / Steinkopff, Darmstadt
Publication country
Germany
Document type
Article
Language
English
Keyword (fr)
Acrylonitrile copolymère Faisceau ionique Faisceau électronique Irradiation Méthacrylate de méthyle copolymère Méthacrylate de méthyle polymère Resist Spectrométrie photoélectron Thermoluminescence Méthacrylate de chloro-4 phényle polymère
Keyword (en)
Acrylonitrile copolymer Ion beam Electron beam Irradiation Methyl methacrylate copolymer Methyl methacrylate polymer Resist Photoelectron spectrometry Thermoluminescence
Keyword (es)
Acrilonitrilo copolímero Haz iónico Haz electrónico Irradiación Metacrilato de metilo copolímero Metacrilato de metilo polímero Resistencia Espectrometría fotoelectrón Termoluminescencia
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D09 Physicochemistry of polymers / 001D09B Polymers and radiations / 001D09B04 Properties and characterization

Discipline
Physical chemistry of polymers
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
7130313

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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