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Titanium nitride for antireflection control and hillock suppression on aluminum silicon metallization

Author
ROCKE, M1 ; SCHNEEGANS, M
[1] Siemens micro-electronics technology cent., Munich 8000, Germany
Source

Journal of vacuum science and technology. B. Microelectronics processing and phenomena. 1988, Vol 6, Num 4, pp 1113-1115 ; ref : 4 ref

CODEN
JVTBD9
ISSN
0734-211X
Scientific domain
Electronics; Computer science
Publisher
American Institute of Physics, New York, NY
Publication country
United States
Document type
Article
Language
English
Keyword (fr)
Aluminium Alliage Application Couche mince Fabrication microélectronique Gravure Mémoire accès direct Photogravure Photorésist Revêtement antiréfléchissant Technologie Titane Nitrure
Keyword (en)
Aluminium Alloys Application Thin film Microelectronic fabrication Engraving Random access memory(RAM) Photoetching Photoresist Antireflection coating Technology Titanium Nitrides
Keyword (es)
Aluminio Aplicación Capa fina Fabricación microeléctrica Grabado Memoria acceso directo Fotograbado Fotorresistente Revestimiento antirreflexión Tecnología Titanio
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
7165014

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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