Silicon in mechanical sensors
- Author
- GREENWOOD, J. C1
[1] STC Technology ltd., Harlow Essex CM17 9NA, United Kingdom - Source
Journal of physics. E. Scientific instruments. 1988, Vol 21, Num 12, pp 1114-1128 ; ref : 5 p
- CODEN
- JPSIAE
- ISSN
- 0022-3735
- Scientific domain
- Electronics; Physics
- Publisher
- American Institute of Physics, New York, NY
/
Institute of Physics, London
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Article synthèse Capteur mesure Extensométrie Manométrie Mécanique Silicium
- Keyword (en)
- Review Measurement sensor Extensometry Manometry Mechanics Silicon
- Keyword (es)
- Artículo síntesis Captador medida Extensometría Manometría Mecánica Silicio
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 7236347
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0022-3735/21/12/001 
https://dx.doi.org/10.1088/0022-3735/21/12/001
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