Use of electron beam lithography to selectively decompose metalorganics into patterned thin-film superconductors
- Author
- MANTESE, J. V1 ; CATALAN, A. B; HAMDI, A. H; MICHELI, A. L; STUDER-RABELER, K
[1] General Motor Research Laboratories, Warren MI 48090-9055, United States - Source
Applied physics letters. 1988, Vol 53, Num 6, pp 526-528 ; ref : 19 ref
- CODEN
- APPLAB
- ISSN
- 0003-6951
- Scientific domain
- Crystallography; Electronics; Optics; Condensed state physics
- Publisher
- American Institute of Physics, Melville, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Baryum Cuivre Yttrium Mixte Composé organométallique Dépôt chimique phase vapeur Ecriture faisceau électronique Fabrication microélectronique Ligne supraconductrice Strontium Titanate Substrat Supraconducteur haute température Supraconductivité Technologie Température transition
- Keyword (en)
- Barium Copper Yttrium Mixed Organometallic compound Chemical vapor deposition Electron beam writing Microelectronic fabrication Superconducting line Strontium Titanates Substrate High temperature superconductor Superconductivity Technology Transition temperature
- Keyword (es)
- Bario Compuesto organometálico Depósito químico fase vapor Escritura haz electrónico Fabricación microeléctrica Línea supraconductora Estroncio Substrato Supraconductor alta temperatura Supraconductividad Tecnología Temperatura transición
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F11 Superconducting devices
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 7321801
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1063/1.100625 
https://dx.doi.org/10.1063/1.100625
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