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Transparent conductive indium oxide film deposited on low temperature substrates by activated reactive evaporation

Author
MARCOVITCH, O1 ; KLEIN, Z; LUBEZKY, I
[1] RAFAEL, Haifa 31021, Israel
Source

Applied optics. 1989, Vol 28, Num 14, pp 2792-2795 ; ref : 22 ref

CODEN
APOPAI
ISSN
0003-6935
Scientific domain
Electronics; Optics; Telecommunications
Publisher
Optical Society of America, Washington, DC
Publication country
United States
Document type
Article
Language
English
Keyword (fr)
Composé minéral Conductivité électrique Couche mince Croissance cristalline Etude expérimentale Evaporation réactive Facteur transmission Indium Oxyde Semiconducteur Température
Keyword (en)
Inorganic compound Electrical conductivity Thin film Crystal growth Experimental study Reactive evaporation Transmittance Indium Oxides Semiconductor materials Temperature
Keyword (es)
Compuesto inorgánico Conductividad eléctrica Capa fina Crecimiento cristalino Estudio experimental Evaporación reactiva Factor transmisión Indio Semiconductor(material) Temperatura
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
7373856

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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