Formation of stable MoSi2/poly-Si films by rapid thermal annealing
- Autor
- PORTIUS, R1 ; DIETRICH, D; HÄSSNER, A; RASCHKE, TH; WIESER, E; WOLKE, W
[1] Sekt. physik/elektronische Bauelemente tech. hochschule Karl-Marx-Stadt, Karl-Marx-Stadt 9010, German Democratic Republic - Fuente
Physica status solidi. A. Applied research. 1987, Vol 100, Num 1, pp 199-206 ; ref : 8 ref
- CODEN
- PSSABA
- ISSN
- 0031-8965
- Campo Científico
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Editor
- Wiley-VCH, Berlin
- País de la publicación
- Germany
- Tipo de documento
- Article
- Idioma
- English
- Palabra clave (fr)
- Composé minéral Conductivité électrique Couche mince Etude expérimentale Microscopie électronique transmission Molybdène Siliciure Métal transition Composé Polycristal Recuit thermique Silicium Spectrométrie Auger Stabilité Support
- Palabra clave (in)
- Inorganic compound Electrical conductivity Thin film Experimental study Transmission electron microscopy Molybdenum Silicides Transition metal Compounds Polycrystal Thermal annealing Silicon Auger electron spectrometry Stability Support
- Palabra clave (es)
- Compuesto mineral Conductividad eléctrica Capa fina Estudio experimental Microscopía electrónica transmisión Molibdeno Metal transición Policristal Recocido térmico Silicio Espectrometría Auger Estabilidad Soporte
- Clasificación
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H60 Physical properties of thin films, nonelectronic
- Disciplina
- Physics of condensed state : structure, mechanical and thermal properties
- Procedencia
- Inist-CNRS
- Base de datos
- PASCAL
- Identificador INIST
- 7450091
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1002/pssa.2211000122 
https://dx.doi.org/10.1002/pssa.2211000122
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