The suppression of residual defects of silicon with group III, IV and V elements
- Author
- HASENACK, C. M1 ; DE SOUZA, J. P; BAUMVOL, I. J. R
[1] UFRGS, inst. fisica, Porto Alegre RS 90049, Brazil - Source
Semiconductor science and technology. 1987, Vol 2, Num 8, pp 477-484 ; ref : 28 ref
- CODEN
- SSTEET
- ISSN
- 0268-1242
- Scientific domain
- Electronics; Optics; Condensed state physics
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Défaut cristallin Elément groupe IVB Elément groupe VB Etude expérimentale Implantation ion Métal groupe IIIB Non métal Recuit Rétrodiffusion Rutherford Silicium
- Keyword (en)
- Crystal defect Group IVB element Group VB element Experimental study Ion implantation Group IIIB metal Non metal Annealing Rutherford backscattering Silicon
- Keyword (es)
- Defecto cristalino Elemento grupo IVB Elemento grupo VB Estudio experimental Implantación ión Metal grupo IIIB No metal Recocido Retrodifusión Rutherford Silicio
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography / 001B60A72 Defects and impurities in crystals; microstructure / 001B60A72V Doping and impurity implantation in iii-v and ii-vi semiconductors
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 7590976
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0268-1242/2/8/001 
https://dx.doi.org/10.1088/0268-1242/2/8/001
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