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Theoretical studies of the modern turbomolecular pump

Author
TU JI-YUAN1 ; YANG NAI-HENG
[1] Northeast univ. technology, Shenyang, China
Source

Vacuum. 1987, Vol 37, Num 11-12, pp 831-837 ; ref : 9 ref

CODEN
VACUAV
ISSN
0042-207X
Scientific domain
Metallurgy, welding; Physics
Publisher
Elsevier, Oxford
Publication country
United Kingdom
Document type
Article
Language
English
Keyword (fr)
Appareil étagé Etude théorique Pompage vide Pompe turbomoléculaire Pompe vide Vide
Keyword (en)
Multistage apparatus Theoretical study Vacuum pumping Turbomolecular pump Vacuum pump Vacuum
Keyword (es)
Aparato poliescalonado Estudio teórico Bombeo vacío Bomba turbomolecular Bomba vacío Vacío
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G30 Vacuum apparatus and techniques

Discipline
Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
7594309

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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