Theoretical approach to the optimal preheating temperature for cw CO2 laser annealing of semiconductors
- Author
- YOUFAN LIU1 ; ENGE WANG
[1] Liaoning TV univ., dep. physics, Liaoning, China - Source
Journal of applied physics. 1987, Vol 62, Num 3, pp 1006-1009 ; ref : 9 ref
- CODEN
- JAPIAU
- ISSN
- 0021-8979
- Scientific domain
- Crystallography; Electronics; Optics; Condensed state physics; Physics
- Publisher
- American Institute of Physics, Woodbury, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Absorption IR Coefficient absorption Coefficient réflexion Etude théorique Faisceau laser Haute température Méthode mesure Recuit Réflexion IR Semiconducteur Silicium Température Théorie classique Théorie semiclassique Très haute température
- Keyword (en)
- Infrared absorption Absorptance Reflectance Theoretical study Laser beam High temperature Measurement method Annealing Infrared reflection Semiconductor materials Silicon Temperature Classical theory Semiclassical theory Very high temperature
- Keyword (es)
- Absorción IR Coeficiente absorsión Coeficiente reflexión Estudio teórico Haz láser Alta temperatura Método medida Recocido Reflexión infrarrojos Semiconductor(material) Silicio Temperatura Teoría clásica Teoría semiclásica Temperatura muy alta
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H20 Optical properties of bulk materials and thin films / 001B70H20C Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity
- Discipline
- Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 7605399
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1063/1.339756 
https://dx.doi.org/10.1063/1.339756
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