ISSM '99 : International symposium on semiconductor manufacturing conference (Santa Clara CA, 11-13 october 1999)
- Author
- IEEE, New York NY, United States (Organiser of meeting)
- Conference name
- IEEE international symposium on semiconductor manufacturing conference (8 ; Santa Clara CA 1999-10-11)
- Source
ISSM '99 : International symposium on semiconductor manufacturing conference (Santa Clara CA, 11-13 october 1999). 1999 ; XI, 469 p ; Illustration ; ref : dissem
- ISBN
- 0-7803-5403-6
- Scientific domain
- Electronics
- Publisher
- IEEE, Piscataway NJ
- Publication country
- United States
- Document type
- Conference Proceedings
- Language
- English
- Keyword (fr)
- Attaque chimique Automatisation Circuit intégré Commande processus Dépôt Détection défaut Fabrication microélectronique Gestion production Implantation ion Industrie électronique Inspection Maîtrise statistique processus Nettoyage Optimisation Ordonnancement Pastille électronique Planification Polissage chimique Polissage mécanique Processus fabrication Protection environnement Rendement
- Keyword (en)
- Chemical etching Automation Integrated circuit Process control Deposition Defect detection Microelectronic fabrication Production management Ion implantation Electronics industry Inspection Statistical process control Cleaning Optimization Scheduling Wafer Planning Chemical polishing Mechanical polishing Production process Environmental protection Yield
- Keyword (es)
- Ataque químico Automatización Circuito integrado Control proceso Depósito Detección imperfección Fabricación microeléctrica Gestión producción Implantación ión Industria electrónica Inspección Control estadístico proceso Limpieza Optimización Ordonamiento Pastilla electrónica Planificación Pulido químico Pulido mecánico Proceso fabricación Protección medio ambiente Rendimiento
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D01 Operational research. Management science / 001D01A Operational research and scientific management / 001D01A13 Inventory control, production control. Distribution
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D02 Computer science; control theory; systems / 001D02D Control theory. Systems / 001D02D09 Process control. Computer integrated manufacturing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Computer science : theoretical automation and systems Electronics Operational research. Management
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 76280
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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Europe PubMed Central access
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