Thermal nitridation of SiOxHy films
- Author
- HABRAKEN, F. H. P. M1 ; GEERLINGS, E. L. J; TIJHAAR, R. H. G; SLOMP, A; VAN DER WEG, W. F
[1] Utrecht state univ., dep. atomic interface physics, Utrecht TA 3508, Netherlands - Source
Journal of applied physics. 1987, Vol 62, Num 6, pp 2573-2575 ; ref : 8 ref
- CODEN
- JAPIAU
- ISSN
- 0021-8979
- Scientific domain
- Crystallography; Electronics; Optics; Condensed state physics; Physics
- Publisher
- American Institute of Physics, Woodbury, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Composé minéral Couche mince Etude expérimentale Nitruration Rétrodiffusion Rutherford Silicium Hydroxyde Spectrométrie Auger Stoechiométrie Température Traitement surface
- Keyword (en)
- Inorganic compound Thin film Experimental study Nitriding Rutherford backscattering Silicon Hydroxides Auger electron spectrometry Stoichiometry Temperature Surface treatment
- Keyword (es)
- Compuesto mineral Capa fina Estudio experimental Nitruración Retrodifusión Rutherford Silicio Espectrometría Auger Estoiquiometría Temperatura Tratamiento superficie
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H45 Solid-fluid interfaces
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 7664461
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1063/1.339429 
https://dx.doi.org/10.1063/1.339429
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