Investigation of the surface photochemical basis for metal film nucleation in laser chemical vapor deposition
- Other title
- Etude de la base photochimique de surface pour la germination d'une couche mince métallique par dépôt chimique en phase vapeur sous laser (fr)
- Author
- HIGASHI, G. S1 ; ROTHBERG, L. J
[1] AT&T Bell Laboratories, Murray Hill NJ 07974, United States - Source
Applied physics letters. 1985, Vol 47, Num 12, pp 1288-1290 ; ref : 13 ref
- CODEN
- APPLAB
- ISSN
- 0003-6951
- Scientific domain
- Crystallography; Electronics; Optics; Condensed state physics
- Publisher
- American Institute of Physics, Melville, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Couche mince Dépôt chimique phase vapeur Germination Laser Préparation Rayonnement UV Réaction photochimique Aluminium(trialkyl) Métal pur Al Aluminium Composé organique
- Keyword (en)
- Thin film Chemical vapor deposition Nucleation Germination Laser Preparation Ultraviolet radiation Photochemical reaction Aluminium Organic compounds
- Keyword (es)
- Capa delgada Depósito químico fase vapor Germinacion Laser Preparacion Rayos ultravioleta Reacción fotoquímica Aluminio
- Keyword (de)
- Duennschicht Chemisches Aufdampfen Keimbildung Laser Vorbereitung Ultraviolettstrahlen
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A05 Specific materials / 001B80A05B Metals, semimetals and alloys
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D11 Metals. Metallurgy / 001D11H Analysing. Testing. Standards / 001D11H02 Nondestructive testing / 001D11H02B Measurement of properties and materials state
- Discipline
- Metals. Metallurgy Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 7932189
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1063/1.96307 
https://dx.doi.org/10.1063/1.96307
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