Optical transmission losses in polycrystalline silicon strip waveguides: Effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength
- Author
- LING LIAO1 ; LIM, Desmond R1 ; AGARWAL, Anuradha M1 ; XIAOMAN DUAN1 ; LEE, Kevin K1 ; KIMERLING, Lionel C1
[1] MIT, Materials Science and Engineering Department, Cambridge, MA 02139, United States - Source
Journal of electronic materials. 2000, Vol 29, Num 12, pp 1380-1386 ; ref : 11 ref
- CODEN
- JECMA5
- ISSN
- 0361-5235
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Circuit intégré monolithique Effet dimensionnel Guide onde optique Ligne bande Optimisation Passivation Performance système Perte transmission Relaxation contrainte Retard signal Silicium Structure surface Traitement thermique Si
- Keyword (en)
- Monolithic integrated circuit Size effect Optical waveguide Strip line Optimization Passivation System performance Transmission loss Stress relaxation Signal delay Silicon Surface structure Heat treatment
- Keyword (es)
- Circuito integrado monolítico Efecto dimensional Guía onda óptica Línea banda Optimización Pasivación Eficacia sistema Pérdida transmisión Relajación tensión Retardo señal Silicio Estructura superficie Tratamiento térmico
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 824763
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1007/s11664-000-0122-4 
https://dx.doi.org/10.1007/s11664-000-0122-4
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