Investigation of the thermal stability of nitrogen-rich amorphous carbon nitride films
- Author
- KULISCH, W1 ; POPOV, C1 ; ZAMBOV, L1 ; BULIR, J2 3 ; DELPLANCKE-OGLETREE, M. P2 ; LANCOK, J3 ; JELINEK, M3
[1] Institute of Technical Physics, University of Kassel, Heinrich-Plett-Strasse 40, 34109 Kassel, Germany
[2] Department of Industrial Chemistry, Université Libre de Bruxelles, 50 av. F.D. Roosevelt, 1050 Brussels, Belgium
[3] Institute of Physics, Academy of Science of the Czech Republic, Na Slovance 2, 18221 Prague, Czech Republic - Conference title
- Proceedings of the 27th International Conference on Metallurgic Coatings and Thin Films, San Diego, California, April 10-14, 2000
- Conference name
- International Conference on Metallurgical Coatings and Thin Films (27 ; San Diego, California 2000-04-10)
- Author (monograph)
- SARTWELL, Bruce D (Editor)1 ; MITTERER, Christian (Editor)2 ; WAHL, Kathryn J (Editor)3 ; PIQUE, Alberto (Editor)4
American Vacuum Society ; Advanced Surface Engineering Division, United States (Funder/Sponsor)
[1] US Naval Research Laboratory, Code 6170, 4555 Overlook Avenue, SW, Washington, DC 20375, United States
[2] The University of Leoben, Department of Physical Metallurgy and Materials Testing, Franz Josef Strasse 18, 8700 Leoben, Austria
[3] US Naval Research Laboratory, Code 6176, 4555 Overlook Avenue, SW, Washington, DC 203785, United States
[4] US Naval Research Laboratory, Code 6372, 4555 Overlook Avenue, SW, Washington, DC 20375, United States - Source
Thin solid films. 2000, Vol 377-78, pp 148-155 ; ref : 38 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Carbone nitrure Composition chimique Couplage inductif Croissance cristalline en phase vapeur Diffraction RX Dépôt laser Epaisseur Etude expérimentale Haute température Laser pulsé Méthode PECVD Rayon X Recuit thermique Spectre IR Spectre Raman Spectrométrie Auger Spectrométrie photoélectron Stabilité thermique Température ambiante Transformation Fourier C N CNx Composé minéral Nitrure
- Keyword (en)
- Carbon nitrides Chemical composition Inductive coupling Crystal growth from vapors XRD Laser deposition Thickness Experimental study High temperature Pulsed lasers PECVD X radiation Thermal annealing Infrared spectra Raman spectra AES Photoelectron spectroscopy Thermal stability Ambient temperature Fourier transformation Inorganic compounds Nitrides
- Keyword (es)
- Acoplamiento inductivo Alta temperatura Recocido térmico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H60 Physical properties of thin films, nonelectronic / 001B60H60D Thermal stability; thermal effects
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15F Laser deposition
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15G Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 841171
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0040-6090(00)01315-8 
https://dx.doi.org/10.1016/S0040-6090(00)01315-8
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