Preparation and structure of carbon film deposited by a mass-separated C+ ion beam
- Author
- MIYAZAWA, T1 ; MISAWA, S; YOSHIDA, S; GONDA, S.-I
[1] Electrotech. lab., Ibaraki, Japan - Source
Journal of applied physics. 1984, Vol 55, Num 1, pp 188-193 ; ref : 38 ref
- CODEN
- JAPIAU
- ISSN
- 0021-8979
- Scientific domain
- Crystallography; Electronics; Optics; Condensed state physics; Physics
- Publisher
- American Institute of Physics, Woodbury, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Carbone Condensation faisceau ionique Couche mince Emission RX Etat amorphe Etude expérimentale Microscopie électronique transmission Non métal Rayon X Spectre photoélectron
- Keyword (en)
- Carbon Ion beam condensation Thin film X ray emission Amorphous state Experimental study Transmission electron microscopy Non metal X ray Photoelectron spectrum
- Keyword (es)
- Estudio experimental Microscopia electronica transmision Rayos X
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 8845873
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1063/1.332862 
https://dx.doi.org/10.1063/1.332862
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