The microstructure of thin aluminum-copper (4,5%) films deposited by sputtering techniques
- Other title
- Microstructures de couches minces aluminium-4,5% cuivre déposées par des techniques de pulvérisation (fr)
- Author
- CHI, G. C; NAKAHARA, S
AT & T Bell lab - Source
Materials letters (General ed.). 1984, Vol 2, Num 5A, pp 380-385 ; ref : 5 ref
- CODEN
- MLETDJ
- ISSN
- 0167-577X
- Scientific domain
- Crystallography; Chemical industry parachemical industry; Condensed state physics; Polymers, paint and wood industries
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Keyword (fr)
- Alliage binaire Alliage2 Al:>50 Cu:5-10 Alliage Attaque chimique Couche mince Etude expérimentale Microscopie électronique transmission Microscopie électronique Microstructure Métal transition Alliage Pulvérisation cathodique Support
- Keyword (en)
- Binary alloy Alloys Chemical etching Thin film Experimental study Transmission electron microscopy Electron microscopy Microstructure Transition metal Alloys Cathode sputtering Cathodic sputtering Substrate Support
- Keyword (es)
- Estudio experimental Microscopia electronica transmision
- Keyword (de)
- Legierung Chemisches Aetzen Duennschicht Experimentelle Untersuchung Elektronenmikroskopie Mikrogefuege Kathodenzerstaeubung Substrat
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A05 Specific materials / 001B80A05B Metals, semimetals and alloys
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 8972964
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0167-577X(84)90116-2 
https://dx.doi.org/10.1016/0167-577X(84)90116-2
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