Low dielectric constant polymers for microelectronics
- Author
- MAIER, G1
[1] Institut für Technische Chemie, Lehrstuhl für Makromolekulare Stoffe, Technische Universität München, Lichtenbergstrasse 4, 85747 Garching, Germany - Source
Progress in polymer science. 2001, Vol 26, Num 1, pp 3-65 ; ref : 248 ref
- CODEN
- PRPSB8
- ISSN
- 0079-6700
- Scientific domain
- Polymers, paint and wood industries
- Publisher
- Elsevier Science, Oxford
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Article synthèse Microélectronique Polymère Relation propriété utilisation Utilisation
- Keyword (en)
- Review Microelectronics Polymer Property utilization relation Use
- Keyword (es)
- Artículo síntesis Microelectrónica Polímero Relación propiedad utilización Utilización
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D10 Polymer industry, paints, wood / 001D10A Technology of polymers / 001D10A08 Application fields
- Discipline
- Polymer industry, paints, wood
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 948703
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0079-6700(00)00043-5 
https://dx.doi.org/10.1016/S0079-6700(00)00043-5
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