MINIATURE PRESSURE TRANSDUCERS WITH A SILICON DIAPHRAGM
- Author
- GIELES ACM; SOMERS GHJ
PHILIPS RESEARCH LAB., EINDHOVEN - Source
- PHILIPS TECH. REV.; NETHERL.; DA. 1973; VOL. 33; NO 1; PP. 14-20
- Document type
- Serial Issue
- Language
- English
- Keyword (fr)
- CAPTEUR PRESSION MANOMETRE EXTENSOMETRE JAUGE PIEZORESISTIVE MANOMETRE PIEZORESISTIF MANOMETRE MINIATURE TRANSDUCTEUR TRANSDUCTEUR PRESSION TECHNOLOGIE PLANAR FABRICATION MICROELECTRONIQUE METROLOGIE ELECTROMAGNETISME ELECTRONIQUE
- Keyword (en)
- MEASUREMENT SCIENCE ELECTROMAGNETISM ELECTRONICS
- Keyword (es)
- METROLOGIA ELECTROMAGNETISMO ELECTRONICA
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics
- Discipline
- Electronics Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL7313011555
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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