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A NEW DIELECTRIC ISOLATION TECHNIQUE FOR BIPOLAR INTEGRATED CIRCUITS USING THIN SINGLE-CRYSTAL SILICON FILMS

Author
KAMINS TI
FAIRCHILD CAMERA AND INSTRUMENTS CORP., PALO ALTO, CALIF.
Source
PROC. I.E.E.E.; U.S.A.; DA. 1972; VOL. 60; NO 7; PP. 915-916; BIBL. 6 REF.
Document type
Serial Issue
Language
English
Keyword (fr)
FABRICATION MICROELECTRONIQUE GRAVURE GRAVURE ELECTROCHIMIQUE ISOLATION ELECTRIQUE TRANSISTOR TRANSISTOR COUCHE MINCE CIRCUIT INTEGRE TECHNOLOGIE ELECTROMAGNETISME ELECTRONIQUE
Keyword (en)
ELECTROMAGNETISM ELECTRONICS
Keyword (es)
ELECTROMAGNETISMO ELECTRONICA
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7314501769

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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