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COMPARISON OF SOURCES OF BORON, PHOSPHORUS, AND ARSENIC IONS

Author
WILSON RG; JAMBA DM
HUGHES RES. LAB., MALIBU, CALIF.
Source
APPL. PHYS. LETTERS; U.S.A.; DA. 1973; VOL. 22; NO 4; PP. 176-179; BIBL. 1 REF.
Document type
Serial Issue
Language
English
Keyword (fr)
SOURCE ION BORE PHOSPHORE ARSENIC DECHARGE OSCILLANTE IMPLANTATION IONIQUE SOURCE BOMBARDEMENT ELECTRONIQUE APPLICATION ELECTROMAGNETISME ELECTRONIQUE
Keyword (en)
ELECTROMAGNETISM ELECTRONICS
Keyword (es)
ELECTROMAGNETISMO ELECTRONICA
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7314513606

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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