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EFFECT OF COMPLEX FORMATION ON DIFFUSION OF ARSENIC IN SILICON

Author
FAIR RB; WEBER GR
BELL TELEPHONE LAB., READING, PA
Source
J. APPL. PHYS.; U.S.A.; DA. 1973; VOL. 44; NO 1; PP. 273-279; BIBL. 26 REF.
Document type
Serial Issue
Language
English
Keyword (fr)
DEFAUT CRISTALLIN DEFAUT COMPLEXE DIFFUSION MECANISME DIFFUSION ARSENIC SILICIUM HETERODIFFUSION DOPAGE ARSENIC PHYSIQUE SOLIDE
Keyword (en)
SOLID PHYSICS
Keyword (es)
FISICA DEL ESTADO CONDENSADO
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7316006248

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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