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ACTIVATED REACTIVE EVAPORATION PROCESS FOR HIGH RATE DEPOSITION OF COMPOUNDS

Author
BUNSHAH RF; RAGHURAM AC
MATER. DEP., UNIV. CALIFORNIA, LOS ANGELES, CALIF.
Source
J. VACUUM SCI. TECHNOL.; U.S.A.; DA. 1972; VOL. 9; NO 6; PP. 1385-1388; BIBL. 24 REF.
Document type
Serial Issue
Language
English
Keyword (fr)
COUCHE MINCE CRISTALLISATION EVAPORATION REACTIVE CRISTALLOGRAPHIE
Keyword (en)
CRISTALLOGRAPHY
Keyword (es)
CRISTALOGRAFIA
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7316104296

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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