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ETUDE PHYSIQUE DES PHENOMENES DE TRANSPORT ATOMIQUE DANS LES COUCHES MINCES.

Author
CROSET M
THOMSON-CSF, 91401 ORSAY
Source
DGRST-7270555; FR.; DA. 1974; PP. (21P.); BIBL. 2 P.; (RAPP. FINAL, ACTION CONCERTEE: PHYS. ELECTRON.)
Document type
Report
Language
French
Keyword (fr)
COUCHE MINCE DIFFUSION AUTODIFFUSION OXYDE SILICIUM CROISSANCE CRISTALLINE SILICIUM TANTALE ALUMINIUM TANTALE ALLIAGE ALUMINIUM ALLIAGE SILICIUM COMPOSE NITRURE PULVERISATION CATHODIQUE PULVERISATION REACTIVE EVAPORATION OXYDATION ALUMINIUM TANTALE ALLIAGE SILICIUM OXYDE SILICIUM NITRURE PHYSIQUE SOLIDE CRISTALLOGRAPHIE
Keyword (en)
SOLID PHYSICS CRISTALLOGRAPHY
Keyword (es)
FISICA DEL ESTADO CONDENSADO CRISTALOGRAFIA
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7530089054

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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