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INFLUENCE DE L'IMPURETE PHOSPHORE SUR LES PROPRIETES PHYSIQUES DE COUCHES DE SIO2 DEPOSEES DANS UN PLASMA

Author
VIRTMANIS AS; KALNYNYA RP; FELTYN IA; FREJBERGA LA; EHGLITIS I EH; EHJMANIS IA
FIZ.-EHNERG. INST., AN LATV SSR
Source
LATV. P.S.R. AKAD. VEST., FIZ. TEH. ZINAT. SER.; S.S.S.R.; DA. 1975; NO 5; PP. 30-34; ABS. ANGL.; BIBL. 8 REF.
Document type
Article
Language
Russian
Keyword (fr)
ABSORPTION IR PROPRIETE PHYSIQUE STRUCTURE MOS OXYDE SILICIUM IMPURETE PHOSPHORE PHYSIQUE SOLIDE
Keyword (en)
SOLID PHYSICS
Keyword (es)
FISICA DEL ESTADO CONDENSADO
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7630078285

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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