INFLUENCE DE L'IMPURETE PHOSPHORE SUR LES PROPRIETES PHYSIQUES DE COUCHES DE SIO2 DEPOSEES DANS UN PLASMA
- Author
- VIRTMANIS AS; KALNYNYA RP; FELTYN IA; FREJBERGA LA; EHGLITIS I EH; EHJMANIS IA
FIZ.-EHNERG. INST., AN LATV SSR - Source
- LATV. P.S.R. AKAD. VEST., FIZ. TEH. ZINAT. SER.; S.S.S.R.; DA. 1975; NO 5; PP. 30-34; ABS. ANGL.; BIBL. 8 REF.
- Document type
- Article
- Language
- Russian
- Keyword (fr)
- ABSORPTION IR PROPRIETE PHYSIQUE STRUCTURE MOS OXYDE SILICIUM IMPURETE PHOSPHORE PHYSIQUE SOLIDE
- Keyword (en)
- SOLID PHYSICS
- Keyword (es)
- FISICA DEL ESTADO CONDENSADO
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL7630078285
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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