CARACTERISATION DE FILMS DIELECTRIQUES DE NITRURES AMORPHES OBTENUS PAR PULVERISATION CATHODIQUE REACTIVE.
- Author
- HANTZPERGUE JJ; DOUCET Y; PAULEAU Y; REMY JC
LAB. PHYS. CHIM. MINER. THERMODYN., UNIV. ANGERS, F-49045 ANGERS CEDEX - Source
- ANN. CHIM.; FR.; DA. 1975; VOL. 10; NO 4-5; PP. 211-220; ABS. ANGL.; BIBL. 23 REF.
- Document type
- Article
- Language
- French
- Keyword (fr)
- GERMANIUM COMPOSE ETAIN COMPOSE PLOMB COMPOSE NITRURE ETAT AMORPHE COUCHE MINCE PULVERISATION REACTIVE CINETIQUE COMPOSITION SPECTROMETRIE IR GERMANIUM NITRURE ETAIN NITRURE PLOMB NITRURE MATERIAU DIELECTRIQUE MATERIAU AMORPHE PULVERISATION CATHODIQUE DEPOT CRISTALLOGRAPHIE ELECTROMAGNETISME ELECTRONIQUE
- Keyword (en)
- CRISTALLOGRAPHY ELECTROMAGNETISM ELECTRONICS
- Keyword (es)
- CRISTALOGRAFIA ELECTROMAGNETISMO ELECTRONICA
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography
- Discipline
- Electronics Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL7640079528
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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