DEVELOPER CHARACTERISTICS OF POLY-(METHYL METHACRYLATE) ELECTRON RESIST
- Author
- GREENEICH JS
GENERAL MOTORS RES. LAB., WARREN, MICH. 48090 - Source
- J. ELECTROCHEM. SOC.; U.S.A.; DA. 1975; VOL. 122; NO 7; PP. 970-976; BIBL. 13 REF.
- Document type
- Article
- Language
- English
- Keyword (fr)
- METHACRYLATE DE METHYLE POLYMERE SOLUBILITE ISOPROPANOL PENTANONE-2(METHYL-4) CINETIQUE TEMPERATURE ENERGIE ACTIVATION LITHOGRAPHIE CHIMIE MACROMOLECULAIRE POLYMERES
- Keyword (en)
- MACROMOLECULAR CHEMISTRY POLYMERS
- Keyword (es)
- QUIMICA MACROMOLECULAR POLIMEROS
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D09 Physicochemistry of polymers
- Discipline
- Physical chemistry of polymers
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL7678000487
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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