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DETERMINATION OF THICKNESS AND REFRACTIVE INDEX OF THIN TRANSPARENT MULTILAYER FILMS ON SILICON FROM ELLIPSOMETRIC DATA.

Author
DOHERTY JG; RYAN WD
DEP. ELECTR. ELECTRON. ENG., QUEEN UNIV., BELFAST BT7 INN, NORTH. IREL.
Source
PROC. INSTIT. ELECTR. ENGRS; G.B.; DA. 1975; VOL. 122; NO 10; PP. 1093-1094
Document type
Article
Language
English
Keyword (fr)
FORTRAN PROGRAMME ORDINATEUR MODE CONVERSATIONNEL ELECTRONIQUE TRAITEMENT INFORMATIQUE ELLIPSOMETRIE EPAISSEUR INDICE REFRACTION COUCHE MINCE COUCHE MINCE TRANSPARENTE SUBSTRAT SILICIUM DISPOSITIF SEMICONDUCTEUR TECHNOLOGIE PLANAIRE STRUCTURE COMPOSEE MESURE TRAITEMENT DONNEE MATHEMATIQUES APPLIQUEES
Keyword (en)
FORTRAN COMPUTER PROGRAMS INTERACTIVE MODE ELECTRONICS COMPUTERIZED PROCESSING ELLIPSOMETRY THICKNESS REFRACTIVE INDEX THIN FILM TRANSPARENT THIN FILM SUBSTRATE SILICON SEMICONDUCTOR DEVICE PLANAR TECHNOLOGY COMPOUNDED STRUCTURE MEASUREMENT AUTOMATIC DATA PROCESSING APPLIED MATHEMATICS
Keyword (es)
MATEMATICAS APPLICADAS
Classification
Pascal
001 Exact sciences and technology / 001A Sciences and techniques of general use / 001A02 Mathematics

Discipline
Mathematics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7730064050

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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