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A NEW CERAMIC BOARD EXPOSURE SYSTEM USING LASER-BEAM AND LINEAR MOTORS.

Author
TAKABA T; EGUCHI N; TAKAHARA M
NIPPON ELECTRIC CO. LTD., 33-1 SHIBA GOCHOME, MINATO-KU, TOKYO, JAP.
Source
N.E.C. RES. DEVELOP.; JAP.; DA. 1976; NO 41; PP. 8-18; BIBL. 1 REF.
Document type
Article
Language
English
Keyword (fr)
LASER MICROELECTRONIQUE FABRICATION CIRCUIT INTEGRE HYBRIDE FABRICATION MICROELECTRONIQUE FAISCEAU LASER EXPOSITION RESINE PHOTOSENSIBLE RESINE APPLICATION ELECTROMAGNETISME ELECTRONIQUE
Keyword (en)
LASER MICROELECTRONICS HYBRID INTEGRATED CIRCUIT MICROELECTRONIC FABRICATION LASER BEAM EXPOSURE RESINS APPLICATION ELECTROMAGNETISM ELECTRONICS
Keyword (es)
ELECTROMAGNETISMO ELECTRONICA
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7730070199

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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