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DRY FILM PHOTORESISTS IN MICROELECTRONICS.

Author
KELEMEN DG
E.I. DU PONT DE NEMOURS AND CO. INC., WILMINGTON, DEL.
Source
SOLID STATE TECHNOL.; U.S.A.; DA. 1976; VOL. 19; NO 8; PP. 37-48 (2P.); BIBL. 2 REF.
Document type
Article
Language
English
Keyword (fr)
RESINE RESINE PHOTOSENSIBLE COUCHE MINCE FABRICATION MICROELECTRONIQUE POLYMERE ELECTROMAGNETISME ELECTRONIQUE
Keyword (en)
RESINS THIN FILM MICROELECTRONIC FABRICATION POLYMER ELECTROMAGNETISM ELECTRONICS
Keyword (es)
ELECTROMAGNETISMO ELECTRONICA
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7730097843

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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