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DRY PROCESSING OF HIGH RESOLUTION AND HIGH ASPECT RATIO STRUCTURES IN GAAS-ALXGA1-XAS FOR INTEGRATED OPTICS.

Author
SOMEKH S; CASEY HC JR
BELL LAB., MURRAY HILL, N.J. 07974
Source
APPL. OPT.; U.S.A.; DA. 1977; VOL. 16; NO 1; PP. 126-136; BIBL. 51 REF.
Document type
Article
Language
English
Keyword (fr)
CIRCUIT OPTIQUE CIRCUIT INTEGRE COUCHE MINCE FABRICATION COMPOSE GALLIUM ARSENIURE GRAVURE OPTIQUE INTEGREE GRAVURE FAISCEAU IONIQUE GRAVURE PULVERISATION GRAVURE PLASMA ARSENIURE GALLIUM OPTIQUE
Keyword (en)
OPTICAL CIRCUIT INTEGRATED CIRCUIT THIN FILM ARSENIDES INTEGRATED OPTICS ION BEAM ETCHING SPUTTERING ETCHING PLASMA ETCHING OPTICS
Keyword (es)
OPTICA
Classification
Pascal
001 Exact sciences and technology / 001B Physics

Discipline
Theoretical physics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7730300256

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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