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A TECHNIQUE FOR MEASURING, DISPLAYING, RECORDING, AND MODIFYING THE SPATIAL UNIFORMITY OF IMPLANTED IONS.

Author
HAMMER WN; MICHEL AE
IBM THOMAS J. WATSON RES. CENT., YORKTOWN HEIGHTS, N.Y. 10598
Source
J. APPL. PHYS.; U.S.A.; DA. 1976; VOL. 47; NO 5; PP. 2161-2164; BIBL. 23 REF.
Document type
Article
Language
English
Keyword (fr)
DISTRIBUTION SPATIALE DISTRIBUTION IMPURETE IMPLANTATION IMPURETE IRRADIATION ION METHODE MESURE CRISTALLOGRAPHIE
Keyword (en)
SPATIAL DISTRIBUTION IMPURITY DISTRIBUTION ION IRRADIATION MEASUREMENT METHOD CRISTALLOGRAPHY
Keyword (es)
CRISTALOGRAFIA
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7740004751

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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